波长范围 420nm ~ 640nm 厚度测量范围 350 ~ 3 Z小光斑尺寸 1.35, 0.135 目标面积 864X648 / 86.4X64.8 物镜转动架 5X(spot size 20), 50X(spot size 0.2) 测量层 1 固定样台面积 270mm(L) X 240mm(D) Z轴再现性 ± 1 自动Z装置 Z direction Head Movement Travel range: 50mm Max. velocity: 50mm/s 特征 Non-destructive OSP thickness measurement No sample preparation for fast and easy operation Available to detect OSP coating on Cu with rough surface conditions Auto-focusing function 3D contours results