产品信息
简单介绍
MKS RGA 残余气体分析仪主要应用在： 1.真空腔體內殘留氣體掃描----Baseline scan 2.測漏----Leak Check 3.生產機台定期維護流程改進----PM optimization 4.製程氣體雜質含量測量----Gas impurities 5.監控【氣體流量控制器】伺服的穩定性----MFC stability 6.終點偵測器----End-point detector 7.製程全程及時監控----In-situ process monitor 8.與機台完全自動化整合----CTP2E MKS残余气体分析的详细介绍
MKS残余气体分析仪主要应用在：
1.真空腔体内残余气体扫描----Baseline scan
2.测漏----Leak Check
3.生产机台定期维护流程改进----PM optimization
4.制程气体製程杂质含量测量----Gas impurities
5.监控【气体流量控制器】伺服的稳定性----MFC stability
6.终点侦测器----End-point detector
7.制程全程及时控制----In-situ process monitor
8.与机台完全自动化整合----CTP2E
MKS残余气体分析仪Vision2000C主要技术参数：
Mass Range Options Vision 2000-C 1-300 amu
Vision 2000-E 1-200 amu
Ion Source High conductance closed ion source
Filaments Independently replaceable twin Tungsten filaments
Mass Filter Double filter (1-inch “RF only” pre-filter with 4-inch main filter)
Detector System Dual (Faraday and secondary electron multiplier)
Maximum Analyzer Operating Pressure 1e-3 Torr at the ion source inlet (standard), higher pressure optional
Minimum Detectable Partial Pressure <2e-11 Torr (for total pressures <1e-4 Torr on baseline inlet)
Minimum Detectable Concentration <200 ppb of highest pressure gas for non-interfering species
Mass Stability Better than ±0.1 amu over 8 hours
Resolution Better than 10% valley between peaks of equal height throughout the mass range
详情可见网站：http://www.dymekchina.cn/
