中性密度滤光片、超冷滤光片、光刻滤光片

中性密度滤光片​ Neutral Density Filters

Neutral Density Filters are the reflective type of ND filters, which are used to control the light intensity. Coated chromel layer attenuates the light by mainly reflecting and partially absorbing. Our ND filters are designed to keep spectrally even performance especially in VIS range without altering the relative spectral distribution of the energy. Still they are available from UV through IR because the substrate material is fused silica. 6 kinds of attenuation rate are available.

超冷滤光片​Super Cold Filters

Super Cold Filters are heat-reflective type which have much better performance than a conventional heat-absorptive type. Even with a high power light source, the substrate will not be damaged because it is reflective type and made of fused silica. VIS transmitting type (750nm cutoff) and VIS-NIR transmitting type (1050nm cutoff) are availble.

光刻滤光片 Photolithography Filters

High power mercury lamps are often used in for photolithography apparatus such as LSI and LCD steppers as light source, especially i-line (365nm) is the most famous line. The bandpass filters for photolithography are required to transmit the monochromatic mercury line efficiently to achieve optimal resolution for the photomask. Furthermore the reliability for environmental durability cannot be negligible to reduce running cost.

Asahi i-line bandpass filters are produced by ion assisted deposition (IAD) technology with monolithic substrate to assure the durability against high temperature and keep stable spectral performance over time.

▪Long life with stable spectral performance thanks to IAD and monolithic substrate

▪According to the requirements, CWL and FWHM are adjustable

▪Excellent coating uniformity despite of large format filter