sputtering sensor sputtering sensorINFICON溅射探头

sputtering sensorINFICON溅射探头

The sensor body and cooling tubes are gold plated beryllium copper for
maximum cooling efficiency in the sputtering environment. A magnet built into
the sensor head reduces excessive heating by energetic free electrons in
sputtering systems by deflecting them with the external magnetic field. The rear
loading crystal holder design allows easy crystal replacement without having to
remove the sensor head from the system.
ADVANTAGES
■ Gold plated beryllium copper sensor body and cooling tubes for
maximum cooling efficiency
■ Magnet to deflect free electrons away from the monitor crystal
■ Easy installation with bendable water tubes allowing flexibility in
sensor placement
■ Rear load crystal insertion for easy crystal replacement
Sputtering Sensor 2
ORDERING INFORMATION
Sputtering Sensor
Sputtering Sensor........................................................................................... 750-618-G1
Sputtering Sensor Shutter Module................................................................. 750-005-G1
NOTES:
Includes 78 cm （30.75"） in-vac cable, crystal snatcher and manual
（other length cables ordered separay） （crystals sold sepearay）
Sensor
Substrate
Source
Shutter
Feedthrough