MCL 纳米线性位移台LR200
- 品牌：NanoLR200
- 型号：NanoLR200
- 产地：美国
- 供应商：北京欧兰科技发展有限公司
- 供应商报价：询价
- 标签：MCL 纳米线性位移台LR200 、MCL 纳米线性位移台LR200 价格、MCL 纳米线性位移台LR200 厂家、、、北京欧兰科技发展有限公司
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Features
| Typical Applications
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| Product Description |
| The Nano-LR200 is designed to provide long range, single axis translation with an absolute minimum of out-of-axis motion. The unique design of the Nano- LR200 produces less than 5 nm of out-of-plane motion; measured over the entire moving platform throughout the 200 μm range of motion. The Nano-LR200 sets the highest level of single axis precision and positioning performance. Internal position sensors utilizing proprietary PicoQ? technology provide absolute, repeatable position measurement with sub-nanometer accuracy under closed loop control. The Nano-LR200 is ideally suited for applications that require extreme parallelism, such as metrology, AFM and MEMS. |
| Technical Specifications | |
| Range of motion (X) | 200 μm |
| Resolution | 0.4 nm |
| Resonant Frequency | 500 Hz ±20% |
| Resonant Frequency (100g load) | 200 Hz ±20% |
| Stiffness | 0.2 N/μm |
| θ roll, θ pitch (typical) | ≤0.3 μrad |
| θ yaw (typical) | ≤0.3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Al |
| Controller | Nano-Drive? |
| * Larger load requirements should be discussed with our engineering staff. | |
| Additional Information | |
| Nano-LR200 Drawing | Nano-LR200 Catalog Pages |
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