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MCL MET10&20型纳米线性位移台

产品信息
  •  

    Features
    • Compact footprint

    • Single axis - 10 or 20 microns

    • Closed loop control

    • Ultra-low noise performance

    • Picometer positioning resolution

    • High speed

     
    Typical Applications
    • High speed, high resolution positioning

    • Metrology

    • AFM

    • SPM

     


     

    Product Description
    The Nano-MET10 and Nano-MET20 are compact, single axis nanopositioning systems with exceptional resonant frequency and low noise characteristics. The Nano-MET10 and Nano-MET20 have picometer positioning resolution. Internal position sensors utilizing proprietary PicoQ® technologyprovide absolute, repeatable position measurement under closed loop control.

    The low noise characteristics and high resonant frequencies make it ideal for demanding metrology applications that require noise floors less than 10 picometers and high speed performance. Related products include the Nano-METZ, Nano-MET2 and Nano- MET3nanopositioning systems.


     

    Technical Specifications
    Range of motion (Nano-MET10) 10 μm
    Range of motion (Nano-MET20) 20 μm
    Resolution (Nano-MET10) 0.01 nm
    Resolution (Nano-MET20) 0.02 nm
    Resonant Frequency 4.6 kHz
    Recommended max. load (horizontal)* 100 g
    Recommended max. load (vertical)* 100 g
    Body Material Aluminum
    Controller Nano-Drive®
    * Larger load requirements should be discussed with our engineering staff.


     

    Additional Information
    Nano-MET10 & Nano-MET20 Drawing

     
    Nano-MET10 & Nano-MET20 Catalog Pages


     

    Related Products
    • MMP Series

    • Nano-OP Series

    • Nano-METZ

    • Nano-MET Series

    • Accessories

    • Nano-Drive®

    • SPM Accessories

     

     
     
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