MCL纳米双轴位移台M250
- 品牌：MCL关注纳米
- 型号：Nano-M250
- 产地：美国
- 供应商：北京欧兰科技发展有限公司
- 供应商报价：询价
- 标签：MCL纳米双轴位移台M250、MCL纳米双轴位移台M250价格、MCL纳米双轴位移台M250厂家、、、北京欧兰科技发展有限公司
产品库
| Features | Typical Applications |
| Product Description |
| The Nano-M250 is a compact, two axis nanopositioning system constructed from titanium or invar. The small dimensions of the Nano-M250 allow it to be easily integrated into existing instrumentation for applications such as nanolithography and SEM. The 0.5” center aperture provides a convienent optical pathway or feedthrough for probe assemblies. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement with picometer accuracy under closed loop control. The Nano-M250 is also available in high vacuum and ultra high vacuum compatible models. |
| Technical Specifications | |
| Range of motion (XY) | 50 μm x 50 μm |
| Resolution | 0.1 nm |
| Resonant Frequency (X) | 1.0 kHz ±20% |
| Resonant Frequency (Y) | 700 Hz ±20% |
| Stiffness | 1.0 N/μm |
| θ roll, θ pitch (typical) | ≤1 μrad |
| θ yaw (typical) | ≤3 μrad |
| Recommended max. load (horizontal)* | 0.5 kg |
| Recommended max. load (vertical)* | 0.2 kg |
| Body Material | Invar or Titanium |
| Controller | Nano-Drive® |
| * Larger load requirements should be discussed with our engineering staff. | |
| Additional Information | |
| Nano-M250 Drawing | Nano-M250 Catalog Pages |
| Related Products |
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