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MCL 纳米双轴、三轴位移台HS系列

产品信息
  •  

    Features
    • High speed, multi-axis

    • XY and XYZ configurations

    • Z-axis step response time down to 2ms

    • Z-axis scans up to 300 Hz

    • Closed loop control

    • Picometer positioning resolution

    • High stability

     
    Typical Applications
    • High speed, high resolution positioning

    • Metrology

    • AFM

    • SPM



     

    Product Description
    The Nano-HS Series is a high speed, multi-axis, precision nanopositioning system with picometer positioning resolution. Offering maximum versatility, the Nano-HS can be configured to provide XY or XYZ motion. Internal position sensors utilizing proprietary PicoQ® technology provide absolute, repeatable position measurement under closed loop control. The compact footprint, ultra-low noise characteristics, and a Z-axis resonant frequency of 5kHz make it ideal for metrology applications that require noise floors less than 10 picometers and/or high speed performance. The Nano-HS2 is an ideal high speed XY scanning stage for use with the MadPLL® system. See the SPM-M Kit for an example of how to combine Mad City Labs equipment to build an AFM or NSOM. For an XYZ system with even higher speed Z, see the Nano-HS3M.


     

    Technical Specifications
    Range of motion (XYZ) 10 μm
    Resolution 0.01 nm
    XY (HS2) Resonant Frequency 1.5 kHz ±20%
    XY (HS3) Resonant Frequency 1.0 kHz ±20%
    Z (HS3) Resonant Frequency 5.0 kHz ±20%
    Scanning Speed up to 300 Hz
    Stiffness (Z-axis) 8 N/μm
    Recommended max. load (horizontal)* 0.1 kg
    Recommended max. load (vertical)* 0.1 kg
    Body Material Al, Invar or Titanium
    Controller Nano-Drive®
    * Larger load requirements should be discussed with our engineering staff.


     

    Position Noise Spectrum
    The Nano-HS Series demonstrates less than 2 picometers of position noise on all three axes. Click below to enlarge and view the data for each axis.


    X-Axis


    Y-Axis


    Z-Axis



     

    Additional Information
    Nano-HS2 Drawing


    Nano-HS3 Drawing
    Nano-HS Series Catalog Pages


     

    Related Products
    • Nano-HS3M

    • Nano-HSZ

    • Nano-LPQ

    • Nano-PDQ Series

    • Nano-Man5

    • Nano-M350

    • Nano-MZ

    • Nano-3D200

    • Accessories

    • Nano-Drive®

    • MadPLL® Instrumentation for AFM/NSOM

    • SPM-M Kit Build Your Own AFM/NSOM

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